Charge-trapping characteristics of BaTiO3 with and without nitridation for nonvolatile memory applications

نویسندگان

  • X. D. Huang
  • R. P. Shi
  • C. H. Leung
  • P. T. Lai
چکیده

The charge-trapping characteristics of BaTiO3 with and without nitrogen incorporation were investigated based on Al/Al2O3/BaTiO3/SiO2/Si (MONOS) capacitors. The physical properties of the high-k films were analyzed by transmission electron microscopy and X-ray photoelectron spectroscopy. Compared with the MONOS capacitor with BaTiO3 as charge-trapping layer, the one with nitrided BaTiO3 showed higher program speed even at lower operating voltage (4.3 V at +8 V for 100 μs), better endurance property and smaller charge loss (charge loss of 10.6 % after 10 s at 85 C), due to the nitrided BaTiO3 film exhibiting higher charge-trapping efficiency caused by nitrogen incorporation and suppressed leakage induced by nitrogen passivation. ⎯⎯⎯⎯⎯⎯⎯⎯⎯⎯⎯⎯⎯⎯⎯⎯⎯⎯ a) Electronic mail: [email protected]

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عنوان ژورنال:
  • Microelectronics Reliability

دوره 54  شماره 

صفحات  -

تاریخ انتشار 2014